... method,inductive; 2Traversing length:100mm; 3Traversing speed:0.1,0.2,0.5,0.8,1mm/s; 4Pick-up return mode:manual ... ,auto; 5Linearity of guideway:1μm/40mm; 6Vertical motorized adjustment of traverse unit ... ) Resolution(vertical):0.25μm/4mm,1.25μm/20mm; 4) Resolution(horizontal):1μm; 5) Measuring parameter:vertical/horizontal distance,included angle ...