Specifications

1  Measuring principle:stylus contact method,inductive; 2Traversing length:100mm; 3Traversing speed:0.1,0.2,0.5,0.8,1mm/s; 4Pick-up return mode:manual,auto; 5Linearity of guideway:1μm/40mm; 6Vertical motorized adjustment of traverse unit:ballscrew system,auto electrical positioning of pick-up; 7 Vertical height adjustment: Roughness unit: 300mm From unit: 240mm 8Measuring range:granite base 500mm×620mm with two T-slots; 9Form measuring system: 1) Measuring range:4/20mm(vertical),100mm(horizontal); 2) Measurement accuracy:0.3%(vertical),0.03%(horizontal); 3) Resolution(vertical):0.25μm/4mm,1.25μm/20mm; 4) Resolution(horizontal):1μm; 5) Measuring parameter:vertical/horizontal distance,included angle,arcradius,chamfer width,distance between circle and X/Y end face,distance between circle centers,distance between intersection points,distance between point and line; 6) Horizontal magnification:2,5,10,20,50,100,200,500; 7) Vertical magnification:10,20,50,100,200,500,1000,2000; 8) Pick-up arm length:150mm; 9) Stylus length:22mm; 10) Stylus angle:11°; 11) Stylus radius:25μm; 12) Setting range of measuring force:0.02-0.06N; 13) Stylus leading/trailling:≤77°(up)/≤88°(down). 10. Surface roughness measuring system: (1) Measuring range: 16 /160 μm (2) Indication error: ≤±5% (3) Smallest resolution: 0.001μm (4) Cut-off length: 0.08, 0.25, 0.8, 2.5, 8mm (5) Assessment length: N x cut-off, N=1, 2, 3, 4, 5 (6) Filter type: ISO, phase corrected, un-filtered, Gaussian (7) Surface parameter: Ra,Ry,Rp,Rv,Rz,Rq,Rtm,Rt,Rpm, Rvm,Sm,S,D,Sk,Rku,q,a,λq,R3y,R3z, NR1, NR2,tp (8) Graph analysis: profile--NR, profile--tp curve, amplitude distribution--tp curve, tp curve and data (9) Vertical magnification: 100, 200, 500, 1000, 2000, 5000, 10000, 20000, 50000, 100000, 200000 (10) Horizontal magnification: 2, 5, 10, 20, 50, 100, 200, 500, 1000, 2000, 5000 (11) Pick-up stylus: diamond-90°angle with spherical tip 5μm radius 11. Primary profile measuring system: (1) Measuring range: 16μm/160μm (2) Measuring parameter: Pa, Pp, Pv, Pz, Pq, Pt, Psk, Pku, Pq, Psm (3) Graph analysis: profile--NR, profile--tp curve,etc.