The turbo molecular pump is a mechanical vacuum pump with a rotor made of a fast rotating turbine blade, helical groove.

The turbo molecular pump is a mechanical vacuum pump with a rotor made of a fast rotating turbine blade, helical groove, or a combination of the two. The gas molecules enter the turbo molecular pump and collide with the surface of the rotors creating kinetic energy causing the gas molecules to move toward the turbomolecular pump exhaust.

SiDoLim TEP's turbomolecular pumps offer full magnetic levitation rotor, which provides for a clean, reliable vacuum for today's semiconductor and solar industries. The TEP Series turbomolecular pumps feature a five axis magnetic bearing and half rack controller requiring no tuning or battery backup.

The TEP Series offers two major types of turbomolecular pumps - high compression, and corrosion resistant.

The TEP Series offers five major types of turbomolecular pumps - temperature controlled corrosion resistant, ultra low vibration, radiation resistant, and ultra high vacuum.

Compound Molecular Pump TEP 250/1600E

Model	TEP 250/1600E
Pumping speed(l/s)	1600
Compression ration	N2: 108;  H2: 5×103
Ultimate pressure(Pa)	less than 1×10-6
Rotational speed (rpm)	27000
Run-up time (min)	less than 8
Bearings	Ceramic ball bearings
Fore line flange	KF50(DN50 ISO-KF)
Inlet flange	LF250(DN250 ISO-K)
Vibration value((mm))	less than 0.1
Recommended backing pump(l/s)	15
Cooling water	temperature less than 25 °C   flow rate more than 60 l/h
Bake-out temperature	less than 100°C at pump shell
Ambient temperature (°C)	5-40
Oil charge quantity(ml)	150
Mounting position	Vertical±5°
Weight (kg)	47

Vacuum turbo molecular pump