... 1mW).3.2 Microwave reactor The ellipse chamber, dimension: long axis 310mm, short axis 200mm The dish chamber, dimension: diameter 400mm, height 300mm ... ; 2000 SCCM)3.5 Sample bracket system: the electric control vertical action range: 180mm. Diameter of the baseplate is ≤φ130mm, and ... 5%.3.8 The system can work stably for a long time: continuous working time > 24h3.9 System microwave leak: comply ...