... 800(VAKIA),Roots Pump ZJ-300,Mechanical pump2X-70,Holding pump2X-15,Pipeline is made of304 Stainless SteelUltimate Vacuum:superior ... fine tuningVacuum IonbombardmentDirect Current3KV,0.6KW clavate cathode(used for cleaning Workpiece by itself before coating) and gas ion ... *18Ion source(selected)1.5KV hall ion source:used for cleaning before electroplating or assisted deposition,which helped acquiring ...