... max)Resolution: SSI: 4μm(max, 24- or 25-bit), 2μm(max, 26-bit) Modbus: 4μm(max) Analog: 16bit D ... F.S./°CSystem resolution: SSI:1μm,2μm,5μm,10μm,20μm,50μm,100μmselectable Modbus: 4μm(max) Analog: depends on indicatedcontrollerZero ... Lvdt sensor,Magnetostrictive linear position sensor,Liquid level controller/transmitters/switch,Capacitance position and level sensor,Ultrasonic displacement sensor/level ...