... P)0~1999μm Vibration speed ( ... 10~200Hz,≤±10% Vibration speed (RMS)10~500Hz,≤±10% Vibration acceleration (O-P)10~1000Hz,≤±10% Vibration displacement (P-P)0~20μm,≤±10%≥20μm ... ,≤±5% Vibration speed (RMS)0~2.0mm/s,≤±10 ... %>2.0mm/s,≤±5% Vibration acceleration (O-P)0~2.0m/s,≤±10 ...