... range Vibration displacement (P-P)0~1999μm Vibration speed (RMS)0~199.9mm/s Vibration acceleration (O-P)0~199 ... /s Vibration displacement (P-P)10~200Hz,≤±10% Vibration speed (RMS)10~500Hz,≤±10% Vibration acceleration (O-P)10~1000Hz,≤±10 ... -P)0~20μm,≤±10%≥20μm,≤±5% Vibration speed (RMS)0~2.0mm/s,≤±10%>2.0mm/s,≤±5% Vibration ...