... 2 pa)≤10Max. workpiece size (mm)Φ510X1800Φ570X1800Φ620X1800Φ680X2000Total power(kw) 7490105105Film typeSemitransparent film, non-conducting film, gold, silver, red ... , blue, green, purple, seven color, etc.Power source typThermal evaporation power, ion bombard power ,RF powerVacuum chamber structureVertical double/single door, horizontal single ...