... ),0.03%(horizontal) Vertical resolution:0.25μm/4mm,1.25μm/20mm Horizontal resolution:1μm Measuring parameter:vertical/horizontal ... magnification:2,5,10,20,50,100,200,500 Vertical magnification:10,20,50,100,200,500,1000,2000 ... Traversing speed:0.1,0.2,0.5, ... 0.8,1mm/s Reverse speed: 1.5mm/s Linearity of guideway:1μm/40mm Vertical adjustment of traverse ...