Product identification Chemical name: 1,1,1,3,3,3-Hexamethyldisilazane Alias: HMDS; Hexamethyldisilazan Product identificationChemical name: 1,1,1,3,3,3-Hexamethyldisilazane Alias: HMDS; HexamethyldisilazaneCAS: 999-97-3EINECS: 213-668-5 ... for special specification. Product transportation and storage1. Do not contact with fire in storage. Keep ventilated and dry. Avoid direct sunlight ...