... and application housing styles. Technical ParameterOutputs:Digital—SSI, Modbus, Analog—voltage, currentMeasured position: SSI—1 position Modbus—1~3 position ... ), 2μm(max, 26-bit) Modbus: 4μm(max) Analog: 16bit D/A outputTemperature coefficient: ±0.007%F.S./°CSystem ... 20μm,50μm,100μmselectable Modbus: 4μm(max) Analog: depends on indicatedcontrollerZero range: 100%F.S. Physical Specifications ...