... : a) specification: wafer from 15 mm to 300 mm outer diameter, inner diameter from 5 mm to 150 mm; Party pieces from 20 ... mm. C) length, the width size tolerance: 0.1 MMD) diameter or less alignment: phi within 30 mm 0.01 mm ... 0.2 mm or less f) within 150 mm of diameter tolerance: + / - 0.02 MMG) thickness tolerance: + / - 0.01 MMH) surface ...