... metal membrane and membrane metal compounds. Pumping speed faster, vacuum stability, and superior quality film, widely used in watches, ... made of stainless steel. Chamber sizeΦ1400~2500mm2. The vacuum system is composed of mechanical pump, roots pump, and ... :Gross weight4000kg8000kgTotal power100KW180KWSuction rate (idling)8×10-3Pa≤20minUltimate vacuum (idling)≤8×10-4PaGas leak rate (idling)0.67Pa ...