... than100PaAtmosphere systemair, oxygen, nitrogen, argon, weakly reducing atmospheres, etcMax loading spaceØ150*160mmCycle cooling water flowmore than 1.5m3/hCycle ... than 60mg/L(tap water can replace it)Control system embeded system and touch screen, connected with PC, with data ... cm2, (national standard is less than 5 mw/cm2)System outside dimension2200*800*1800mm(L*W*H) high temperature microwave ...