... Chamber Structurevertical / horizontal (304 stainless steel), vacuum system post positionedVacuum Systemslide valve pump(rotary pump), roots pump ... molecular pump, deep cold pump, deep cold system)Heating Systemheated by heating tube, PID control, the max temperature: 350 ... the fully automatic pumping and E-beam evaporation system.Ultimate Vacuum8×104paclean and unloadedPump TimeFrom atmosphere ...