... Modbus, Analog—voltage, currentMeasured position: SSI—1 position Modbus—1~3 position Analog—1~2 positionRange: 50~8000mmPower supply: 24VCommunication: EIA-RS485/RS422Update time: SSI, Modbus ... 25-bit), 2μm(max, 26-bit) Modbus: 4μm(max) Analog: 16bit D/A outputTemperature coefficient: ±0.007%F ... ,10μm,20μm,50μm,100μmselectable Modbus: 4μm(max) Analog: depends on indicatedcontrollerZero range: 100%F.S. ...