... mm diameter (2 µm focus, transmission target);5 µm for objects up to 10 mm diameter (2 µm focus, transmission target);10 µm for objects up ... to 20 mm diameter (6 µm focus, directional target);20 µm for ... to 10 mm diameter (2 µm focus, transmission target);5 µm for objects up to 20 mm diameter (6 µm focus, directional target);10 µm ...