... for Ar gas), permanent magnets in target material surface form 250 to 350 gauss magnetic field, the electric field with high pressure of ... of spraying technology worker training * target material made of ... carbide ceramic sputtering target materials, carbide ... with a oxidation silicon chromium ceramic target materials (Cr-SiO), base ... target, In, iron target, Fe, zirconium ... Ge target, Ge, silver target, Ag, ...