A colorless, nonflammable, and odorless gas. A colorless, nonflammable, and odorless gas.CF4,%(V/V)≥ 99.99 99.9 99N2,%(V/V)≤ 0.002 0.03 0.3O2,%(V/V)≤ 0.0005 0.01 0.1MOISTURE,PPM≤ 5 5 10CO2,PPM≤ 5 10 800CF,PPM≤ 15 20 -ACIDITY,(HF)PPM≤ 0.1 1 -SF6,PPM≤ - - 600 Carbon Tetrafluoride CF4