... sf6 gas 1.Grade:99.99%-99.999% 2. usage:Electronics equipment,transformer,refrigerating fluid the high-purity sf6 gasSulfur Hexafluoride (SF6 ... )It is a colorless, tasteless, odorless, non-toxic, non- burning gas with ... ect.It is a good cleaning gas and etching gas for plasma process.---------------------------------------------PURITY 99.99 ... .1 ppm < 0.1 ppm SF6 GAS