It can realize coating speed and process under auto control with advantages of high uniformity of films with ... on.It can realize coating speed and process under auto control with advantages of high uniformity of films with good ... resistance evaporation, single power source, power: 5WE-beam,high pressure, adjustable, 6KV-10KV,power: 6KWIon sourceKerr source,double filament,power: 2KWFilm thickness ...