... TypeResistance Evaporation Power Supply,Ion bombardment Power Supply,Filament power supply,Pulse Bias Power Supply,Direct Current magnetron power Supply, ... Steel ChamberUltimate Vacuum8.0×10-4PaPump-out Time(no-load)From air to 5.0×10-2Pa≤8minVacuum ... 2 pairEvaporation Power15KW15KW20KW25 KW30KW35KWTotal Power50KW50KW65KW85 KW100KW135KWProcess GasTwo or three process gas flow control and display system, ...