Micro-optics Device Infrared Detecting Device Biology Electrophoresis Chip Liquid Crystal Display Acoustic Wave De

Exposure Area: 100mm×100mm

Resolution: 1.5µm

Parietal Gradient: 82°( Photoresist Thickness: 300µm )

Illuminating Uniformity: ±4%

Most Photoresist Thickness: 0.3mm

Alignment precision: ±0.8µm

Depth to Width: >15:1

Hg-Lamp Power: 200W

Exposure Model: Timing or Dosing