Silicon Target Purity: Si 5N or 6N Resistity:0.02ohm/cm max.or 0.5-5 ohm/cm max. Type: Single and Poly Si Targets

Silicon Target

Type: Mono crystal Si target and Poly crystal Si target

Purity:     Si:99.999% min. and 99.9999% min.

Resistivity: 0.02ohm·cm max.,

                 0.02ohm·cm max. and  0.5-5 ohm·cm

Sizes:      

Length:300mm max.

Width:125mm max.

Thickness: 2mm-20mm