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PHOSPHORIC ACID (ELECTRONIC GRADE)
CAS 7664-38-2
Colorless,odorless,viscous liquid.soluble in water and alcohol.
Usage:It is mainly used as the cleaning and ethching agent in TFT-LCD and IC production.It's also used as the etchant for etching for aluminium abd silicon nitride film in semisilicon IC.It's also the main stuff of the high-purity phosphate and organic phosphorus products.
PHOSPHORIC AICD ELECTRONIC GRADE