producing line overall structure descriptionMagnetron sputtering coating equipment is designed specially for the slab building glass coating, can satisfy the production ChanYin, double silver low-e, sunshine control film layer coating and tempered the ChanYin low radiation glass.Design mechanical takt time for 60 seconds,Coating equipment using seven chamber structure:Import chamber + into the buffer room + ends transfer chamber of the GongYiShi + export buffer room + export chamberCathode station number configured to 36, initial investment and table cathode, including 32 sets for rotating cathode, 4 table plane cathode.Process equipment to (sputtering area) is divided into 44 width is 730 mm bulkhead (Von Ardenne)Each a cathode by turbine molecular pump on vacuum, molecular pump according to the technological requirements of distribution.Used in segmentation different process combination (metallicity... oxide) gas isolation, by vacuum pumping station of two adjacent bulkhead to achieve. Adjustable slit size, ensure that different gas cross contamination drop to the minimum.

Performance characteristics

1, beautiful shape, good quality, excellent configuration2, low energy consumption3, capacity big4, beat fastFive, the control system is advanced6, ultimate vacuum high7, different products can be steel, long storage time8, product processing cycle is short

low-e producing line