... . Low Power Consumption 4. Harsh Environment (shock, vibration, Specification♦ Based on MEMS Process ♦ Extra Small ... is a new extra small high resolution Vibration Sensor based upon a bulk micromachined silicon sensing ... Measurement, Vibration MeasurementIndustrial: Vibration Monitoring, Platform Stability, Robot,HUMSSafety: Anti-invade, Recorder,automobile safety control MVS6000 MEMS Vibration Sensor